Photolithography and Miscellaneous Processing Equipment

We have Fluorocarbon wafer cleaners (Mark V, SC-1600), a PlasmaTherm RF plasma loading/ tuning controller, a Hybond bonding system, a Proheco DI water system, a Neutronix calibration set for Canon parallel light mask aligners, Alpha Technology spin coaters, various vacuum / baking ovens from Blue M and GCA Precision.

Stainless Steel DI Water System

  • Manufacturer: Proheco Manufacturing
  • Model: RS-9-292-3
  • Comes with temperature control system no. 1 BD-3402
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    Wafer Cleaner

  • Manufacturer: Fluorocarbon
  • Model: Mark V
  • Comes with Verteq Controller
  • Operational when deinstalled
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    Wafer Cleaner

  • Manufacturer: Fluorocarbon
  • Model: SC-1600
  • Operational when deinstalled
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    Photoresist Spin Coater

  • Manufacturer: Alpha Technology (originally by Micronetics)
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    RF Plasma Loading/ Tuning Controller

  • Manufacturer: PlasmaTherm
  • Model: SEV-2DC
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    Hybond Bonder

  • Manufacturer: Hybond
  • Model: 512
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    Baking Oven

  • Manufacturer: Blue M
  • Model: IGF146B-3
  • 3 phase, 208 V, 60 hz
  • Max. temp. 316 ℃ (600 ℉)
  • Chamber 14"x14"x14"
  • Outside size: 42" H x 29" W x 24" D
  • Power-O-Matic-60 saturable reactor proportioning control
  • Operational when deinstalled.
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    Vacuum Oven

  • Manufacturer: Blue M
  • Model: IGF 7146C-4X
  • 208 V-240 V, 1 phase
  • Max. temp. 316 ℃ (600 ℉)
  • Chamber 14"x14"x14"
  • Outside size: 42" H x 29" W x 24" D
  • Operational when deinstalled
  • Pump optional
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    Vacuum Oven

  • Manufacturer: Blue M
  • Model: POM 588C-3 GOP
  • 208 V- 240 V, 1 phase, 60 hz
  • Max. temp. 260 ℃ (500 ℉)
  • Stabil Therm electric oven
  • Chamber size: 24"x24"x24"
  • Outside size: 48" H x 33" W x 31" D
  • Operational when deinstalled
  • Pump optional
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    Gravity Convection Oven

  • Manufacturer: GCA Precision
  • Model: 31478-17
  • Outside size: 32" H x 24" W x 18" D
  • Max. temp. 225 oC (437 oF)
  • Operational when deinstalled
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    Calibration Set

  • Manufacturer: Neutronix
  • Model: for Canon Parallel Light Mask Aligners
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    Potentiostat/ Galvanostat

  • Manufacturer: EG&G Princeton Applied Research
  • Model: 173
  • 208 V-240 V, 1 phase
  • Max. temp. 316 ℃ (600 ℉)
  • Chamber 14"x14"x14"
  • Outside size: 42" H x 29" W x 24" D
  • Operational when deinstalled
  • Pump optional
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    Spinner Control

  • Manufacturer: Headway Research
  • Operational when deinstalled
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